Optromix CLS-5000/CL-7000/CL-7500 Product Line
Shot Pulsed 193 nm, 248 nm, 308 nm (157 nm Custom) Excimer Lasers

Parameter |
CLS-5000 |
CL-7000 |
CL-7500 |
Operating mode |
Pulsed |
||
Wavelength |
193 nm, 248, nm, 308 nm,157 nm (Custom) |
193 nm, 248 nm |
|
Max. Pulse Energy (mJ) |
12 – 25 mJ |
250 – 400 mJ |
100 – 250 mJ |
Pulse duration (ns) |
11 –12 ns |
17 –20 ns |
20 ns |
Maximum repetition rate (Hz) |
500 Hz |
100 Hz |
50 Hz |
KEY FEATURES
● High beam position stability
● High beam pointing stability
● High repetition rate
● Compact size
● Energy stabilization