Optromix CLS-5000 Product Line
Shot Pulsed 193 nm. 248 nm, 308 nm (157 nm Custom) Excimer Laser

Parameter |
ArF |
KrF |
XeCl |
Wavelength (nm)* |
193 |
248 |
308 |
Maximum repetition rate (Hz) |
500 |
||
Maximum pulse energy (mJ ) |
15 |
25 |
12 |
Stability of pulse energy (sigma, %) |
< 2 |
||
Beam size (at 1/e2 of peak, V x H mm) |
6 x 3,5 |
6 x 4 |
6 x 4 |
Beam divergency (FWHM, V x H mrad) |
1 x 1 |
||
Pulse duration (ns) |
11 |
12 |
12 |
Dimensions (L x W x H, mm) |
887 х 336 х 454 |
||
Weight (kg) |
85 |
||
Power consumption |
220 V, 50 Hz, 1000 VA * * |
||
Cooling |
water < 1 l/min |
||
Gas |
1 premix cylinder |
||
Control |
RS 232, Windows |
* – option wavelength 157 nm
** – option 110V/60 Hz, 1000 VA
KEY FEATURES
● High beam position stability
● High beam pointing stability
● High repetition rate
● Magnetic switch generator
● Compact size
● Built-in Energy monitor
● Energy stabilization