Optromix CL-7500 Product Line

Narrow Linewidth High Pulse Energy 193 nm, 248 nm Excimer Laser

Parameter ArF KrF
Wavelength (nm) 193 248
Linewidth (pm) < 3
Nominal Pulse Energy (mJ) 100 250
Max repetition rate (Hz)
CL 7520
CL 7550
20
50
Pulse Duration (ns) ~ 20
Stability of pulse energy (sigma, %) < 2
Beam Size (FWHM, V x H, mm) 20 x 6
Beam Divergency (FWHM, V x H, mrad) < 0.2
Spatial coherence (mm) >5
Temporal coherence (mm) >10
Jitter (ns) < 2
Dimensions (L x W x H, mm) 2000 x 800 x 747
Cooling water < 3 liter/min
Power Consumption 380/220V, 50Hz,7kW
Gas 1 premix cylinder
Control RS 232, Windows

KEY FEATURES

Narrow linewidth excimer laser

MOPA design – Master Oscillator & Power Amplifier

Wavelength tuning

 

APPLICATIONS

● FBG writing

Optromix CL-7500 model is a high pulse energy DUV Excimer laser using ArF, KrF gas premixes. The corresponding wavelengths are 193 nm and 248 nm.

PDF: Excimer Laser Optromix Optromix CL-7500, 193 nm, Max. Pulse Energy up to 100 mJ

PDF: Excimer Laser Optromix Optromix CL-7000, 248 nm, Max. Pulse Energy up to 250 mJ

Optromix highest priority is to deliver you the best product that suits your specific needs. We can customize our products by requests.
If you would like to purchase an Narrow Linewidth Fiber Laser, please contact us at info@optromix.com or +1 617 558 9858