Optromix CL-7500 Product Line
Narrow Linewidth High Pulse Energy 193 nm, 248 nm Excimer Laser
| Parameter | ArF | KrF |
| Wavelength (nm) | 193 | 248 |
| Linewidth (pm) | < 3 | |
| Nominal Pulse Energy (mJ) | 100 | 250 |
| Max repetition rate (Hz) CL 7520 CL 7550 |
20 50 |
|
| Pulse Duration (ns) | ~ 20 | |
| Stability of pulse energy (sigma, %) | < 2 | |
| Beam Size (FWHM, V x H, mm) | 20 x 6 | |
| Beam Divergency (FWHM, V x H, mrad) | < 0.2 | |
| Spatial coherence (mm) | >5 | |
| Temporal coherence (mm) | >10 | |
| Jitter (ns) | < 2 | |
| Dimensions (L x W x H, mm) | 2000 x 800 x 747 | |
| Cooling | water < 3 liter/min | |
| Power Consumption | 380/220V, 50Hz,7kW | |
| Gas | 1 premix cylinder | |
| Control | RS 232, Windows | |
KEY FEATURES
● Narrow linewidth excimer laser
● MOPA design – Master Oscillator & Power Amplifier
● Wavelength tuning