Optromix CL-7000 Product Line
High Pulse Energy 193 nm, 248 nm, 308 nm (157 nm Custom) Excimer Laser

Parameter |
ArF |
KrF |
XeCl |
Wavelength (nm)* |
193 |
248 |
308 |
Tube material |
metal & ceramic |
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Preionization |
spark |
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Max. Pulse Energy (mJ ) |
250 |
400 |
300 |
Average Power (W) |
|||
CL 7020CL 7050CL 7100 |
51225 |
82035 |
61525 |
Max. repetition rate (Hz) |
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CL 7020CL 7050CL 7100 |
2050100 |
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Pulse Duration (ns) |
17 |
20 |
20 |
Stability of pulse energy (sigma, %) |
<2 |
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Beam Size (V x H, mm) |
20 x 6 |
21 x 6 |
22 x 6 |
Beam Divergency (V x H, mrad) |
4.5 x 1.5 (stable resonator) |
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Jitter (ns) |
<2 |
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Dimensions (L x W x H, mm) |
1423 x 375 x 760 |
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Weight (kg) |
170 |
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Cooling |
|||
CL 7020CL 7050CL 7100 |
airwater <1 l/minwater <3 l/min |
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Power Consumption |
|||
CL 7020CL 7050CL 7100 |
220 V, 50 Hz, 1.5 kW**220 V, 50 Hz, 1.8 kW**380V, 50 Hz, 3.5 kW** |
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Gas |
1 premix cylinder |
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Control |
RS 232, Windows |
* – option wavelength 157 nm
** – option 110 V (220 V)/60 Hz
KEY FEATURES
● High pulse energy
● Metal ceramic design
● Long lifetime gas premix
● Reliable thyratron switch
● Built-in energy monitor
● Energy stabilization
● Air-cooled versions up to 20 Hz