CL-7500 Excimer Laser




Key Features:


  • Narrow linewidth excimer laser
  • MOPA design - Master Oscillator & Power Amplifier
  • Wavelength tuning
ArF KrF
Wavelength 193 nm 248 nm
Linewidth < 3 pm
Nominal Pulse Energy 100 mJ 250 mJ
Max repetition rate CL 7520 / CL 7550 20 Hz / 50 Hz
Pulse Duration ~ 20 ns
Stability of pulse energy sigma < 2%
Beam Size (V x H) 20 mm x 6 mm
Beam Divergency (V x H) < 0.2 mrad

Applications:


  • Laser-induced fluorescence spectroscopy
  • Processing material with high spatial resolution
  • DUV Lithography

Optromix CL-7500 is a narrow linewidth excimer laser with 193 nm and 248 nm wavelengths options. Our excimer laser has a special MOPA design, which means that its configuration includes a master oscillator and a power amplifier.

Moreover, one of the key features of this laser is tunable wavelength, which enables excimer laser to perform outstandingly well certain applications. In particular, it is a good solution for laser-induced fluorescence spectroscopy and processing material with high spatial resolution.

CL-7520 Excimer Laser, 193 nm, Nominal Pulse Energy 100 mJ, Pulse Duration ~ 20 ns, Max Repetition Pulse 20 Hz Detailed Characteristics Ask for quotation
CL-7550 Excimer Laser, 193 nm, Nominal Pulse Energy 100 mJ, Pulse Duration ~ 20 ns, Max Repetition Pulse 50 Hz Detailed Characteristics Ask for quotation
CL-7520 Excimer Laser, 248 nm, Nominal Pulse Energy 250 mJ, Pulse Duration ~ 20 ns, Max Repetition Pulse 20 Hz Detailed Characteristics Ask for quotation
CL-7550 Excimer Laser, 248 nm, Nominal Pulse Energy 250 mJ, Pulse Duration ~ 20 ns, Max Repetition Pulse 50 Hz Detailed Characteristics Ask for quotation

If you would like to buy CL-7500 Excimer Laser, please Contacts at: or +1 617 558 98 58